REVIEW ARTICLE

A step by step account of the exciting litigation case related to MEMS microphone, between Chicago based Knowles and China based later bloomer Goer.

MEMS motion sensor development history of Analog Devices, Bosch, and InvenSense.

MEMS motion sensor development history of Analog Devices, Bosch, and InvenSense.

MEMS motion sensor development history of Analog Devices, Bosch, and InvenSense.

MEMS motion sensor development history of Analog Devices, Bosch, and InvenSense.

MEMS technology started in 1950's and went through several important phases.  Notable events include the discovery of piezoresistivity in silicon and the anisotropic chemical etching process. (click for higher resolution version).

Dr Chang Liu, Copyright

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