- Dr Chang Liu|万里千人
Foundations of MEMS teaching materials
Teaching materials related to the Foundations of MEMS teaching can be found and downloaded from here.

Foundations of MEMS Table of Contents
Course PPTs
Introduction to Integrated Circuits Fab and Integration
Lecture 1: Frame work of microelectronics
Lecture 2: Introduction
Lecture 3: Lithography
Lecture 4: Lithography and Metalization
Lecture 5: Oxidation
Lecture 6: Metal deposition
Lecture 7: Etching
Lecture 8: Doping and Ion Implantation
Lecture 9: Interconencts
Lecture 10: Process magic of MEMS (alternative low yield processes)
Lecture 11: Accelerometers
Lecture 12: Microfluidics
Lecture 13: Surface micromachining
Lecture 14: Bulk micro machining
Lecture 15: Electrostatic MEMS
Lecture 16: Scanning Probe Microscope (SPM)
Lecture 17: BiCMOS Circuit Integration
Lecture 18: Pressure sensors and acoustic sensors fundamentals
Homework solutions